Engineering & Transportation | Engineering

Plasma Processing of Semiconductors

by P.f. Williams

2020-07-22 15:10:09

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Plasma Processing of Semiconductorscontains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and... Read more
Plasma Processing of Semiconductorscontains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications.
Audience:Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge. Less

Book Details

File size24 X 16 X 0 in
Print pages613
PublisherSpringer-Verlag/Sci-Tech/Trade
Publication date October 12, 2012
LanguageEnglish
ISBN9789401158848
autor-image
P.f. Williams
Author
...

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