Spectroscopic Ellipsometry and Reflectometry: A User's Guide

by Harland G. Tompkins

2020-12-29 07:48:54

While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectr... Read more
While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science. Less

Book Details

File size9.45 X 6.28 X 0.78 in
Print pages248
PublisherWiley
Publication date March 18, 1999
LanguageEnglish
ISBN9780471181729

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